Voltage-induced material removal mechanism of copper for electrochemical-mechanical polishing applications

Sang-JunHAN,Yong-JinSEO

Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (Special 1) : 262-265.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (Special 1) : 262-265.
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Voltage-induced material removal mechanism of copper for electrochemical-mechanical polishing applications

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 19(Special 1): 262-265

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